Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning | Scientific Reports - Nature.com

6/9/2022 12:00:00 AM2 years 10 months ago
Scientific Reports - Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning
Vertical deposition method In general, when parylene C deposition is carried out with the sample in a horizontal direction, films are formed on both the upper side and lower side surfaces of the sam… [+15424 chars]
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