Canon commences sales of FPD lithography equipment that achieves ±1.5 µm resolution with an overlay accuracy of ±0.35 µm for Generation 8 glass panels - Canon Global

TOKYO, July 20, 2022—Canon Inc. announced today that the company has commenced sales of the MPAsp-H1003H, a new flat panel display (FPD) lithography system that is capable of resolving 1.5 µm1 (L/S2) features across Generation 8 glass panels3.

TOKYO, July 20, 2022—Canon Inc. announced today that the company has commenced sales of the MPAsp-H1003H, a new flat panel display (FPD) lithography system that is capable of resolving 1.5 µm1 (L/S2)… [+2964 chars]

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